E-PhAuto Series
Integrated Solution (Hardware with Software)
A turn-key solution for automated integrated photonics tests
- High scalability from Die-level to wafer-scale probe stations (up to 300-mm wafers)
- Support edge and surface coupling
- Ultra-fast navigation with nanoscale optical alignment
- Fully automated electronic-photonic test for high-throughput operation
- User-friendly operating system enhanced with integration of advanced electrical and optical instruments
- Seamless integration with an existing data platform or EVHA’s E-Tensor